Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning

Yuen Kuan Yong, Kexiu Liu, S. O. Reza Moheimani. Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning. IEEE Trans. Contr. Sys. Techn., 18(5):1172-1179, 2010. [doi]

Authors

Yuen Kuan Yong

This author has not been identified. Look up 'Yuen Kuan Yong' in Google

Kexiu Liu

This author has not been identified. Look up 'Kexiu Liu' in Google

S. O. Reza Moheimani

This author has not been identified. Look up 'S. O. Reza Moheimani' in Google