A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams in Pure Axial Deformation

Mingzhi Yu, Libo Zhao, Chen Jia, Hongyan Wang, Yulong Zhao, Zhuangde Jiang. A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams in Pure Axial Deformation. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 176-180, IEEE, 2019. [doi]

Authors

Mingzhi Yu

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Libo Zhao

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Chen Jia

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Hongyan Wang

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Yulong Zhao

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Zhuangde Jiang

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