Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications

Fenglian Yuan, Qingling Zhao, Bo Huang, Chunrong Pan. Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications. Journal of Systems Architecture, 134:102788, 2023. [doi]

Authors

Fenglian Yuan

This author has not been identified. Look up 'Fenglian Yuan' in Google

Qingling Zhao

This author has not been identified. Look up 'Qingling Zhao' in Google

Bo Huang

This author has not been identified. Look up 'Bo Huang' in Google

Chunrong Pan

This author has not been identified. Look up 'Chunrong Pan' in Google