Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Ali Obeid. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. J. Scheduling, 18(2):195-205, 2015. [doi]

@article{YugmaBDO15,
  title = {Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook},
  author = {Claude Yugma and Jakey Blue and Stéphane Dauzère-Pérès and Ali Obeid},
  year = {2015},
  doi = {10.1007/s10951-014-0381-1},
  url = {http://dx.doi.org/10.1007/s10951-014-0381-1},
  researchr = {https://researchr.org/publication/YugmaBDO15},
  cites = {0},
  citedby = {0},
  journal = {J. Scheduling},
  volume = {18},
  number = {2},
  pages = {195-205},
}