Sungil Yun, Matthew Tom, Gerassimos Orkoulas, Panagiotis D. Christofides. Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching. Computers & Chemical Engineering, 163:107861, 2022. [doi]
@article{YunTOC22,
title = {Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching},
author = {Sungil Yun and Matthew Tom and Gerassimos Orkoulas and Panagiotis D. Christofides},
year = {2022},
doi = {10.1016/j.compchemeng.2022.107861},
url = {https://doi.org/10.1016/j.compchemeng.2022.107861},
researchr = {https://researchr.org/publication/YunTOC22},
cites = {0},
citedby = {0},
journal = {Computers & Chemical Engineering},
volume = {163},
pages = {107861},
}