Improvement of thermal stability of nickel germanide using nitrogen plasma pretreatment for germanium-based technology

Bingxin Zhang, Xia An, Pengqiang Liu, Xiangyang Hu, Ming Li, Xing Zhang 0002, Ru Huang. Improvement of thermal stability of nickel germanide using nitrogen plasma pretreatment for germanium-based technology. Science in China Series F: Information Sciences, 61(10), 2018. [doi]

Authors

Bingxin Zhang

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Xia An

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Pengqiang Liu

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Xiangyang Hu

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Ming Li

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Xing Zhang 0002

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Ru Huang

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