Investigation Of Loading Effect In Deep Trench Lisa Technology

Q. X. Zhang, Q. Y. Guo, J. Li, A. Q. Liu. Investigation Of Loading Effect In Deep Trench Lisa Technology. International Journal of Computational Engineering Science, 4(2):303-306, 2003. [doi]

@article{ZhangGLL03,
  title = {Investigation Of Loading Effect In Deep Trench Lisa Technology},
  author = {Q. X. Zhang and Q. Y. Guo and J. Li and A. Q. Liu},
  year = {2003},
  doi = {10.1142/S1465876303001137},
  url = {http://dx.doi.org/10.1142/S1465876303001137},
  researchr = {https://researchr.org/publication/ZhangGLL03},
  cites = {0},
  citedby = {0},
  journal = {International Journal of Computational Engineering Science},
  volume = {4},
  number = {2},
  pages = {303-306},
}