Xiao-Lin Zhang, Janak Singh, Ajay Agarwal, Q. X. Zhang. A New Process For Fabricating Convex Corners In Silicon. International Journal of Computational Engineering Science, 4(2):307-310, 2003. [doi]
@article{ZhangSAZ03, title = {A New Process For Fabricating Convex Corners In Silicon}, author = {Xiao-Lin Zhang and Janak Singh and Ajay Agarwal and Q. X. Zhang}, year = {2003}, doi = {10.1142/S1465876303001149}, url = {http://dx.doi.org/10.1142/S1465876303001149}, researchr = {https://researchr.org/publication/ZhangSAZ03}, cites = {0}, citedby = {0}, journal = {International Journal of Computational Engineering Science}, volume = {4}, number = {2}, pages = {307-310}, }