Xiao-Lin Zhang, Janak Singh, Ajay Agarwal, Q. X. Zhang. A New Process For Fabricating Convex Corners In Silicon. International Journal of Computational Engineering Science, 4(2):307-310, 2003. [doi]
@article{ZhangSAZ03,
title = {A New Process For Fabricating Convex Corners In Silicon},
author = {Xiao-Lin Zhang and Janak Singh and Ajay Agarwal and Q. X. Zhang},
year = {2003},
doi = {10.1142/S1465876303001149},
url = {http://dx.doi.org/10.1142/S1465876303001149},
researchr = {https://researchr.org/publication/ZhangSAZ03},
cites = {0},
citedby = {0},
journal = {International Journal of Computational Engineering Science},
volume = {4},
number = {2},
pages = {307-310},
}