Tao Zhao, Yung C. Liang. New actuation method for push-pull electrostatic MEMS comb drive. IEEE Transactions on Industrial Electronics, 50(6):1337-1339, 2003. [doi]
@article{ZhaoL03-1,
title = {New actuation method for push-pull electrostatic MEMS comb drive},
author = {Tao Zhao and Yung C. Liang},
year = {2003},
doi = {10.1109/TIE.2003.819567},
url = {http://dx.doi.org/10.1109/TIE.2003.819567},
researchr = {https://researchr.org/publication/ZhaoL03-1},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Industrial Electronics},
volume = {50},
number = {6},
pages = {1337-1339},
}