Automated axis alignment for a nano manipulator inside SEM

Chao Zhou, Zhengxing Wu, Lu Deng, Yu Wang, Zhiqiang Cao, Min Tan. Automated axis alignment for a nano manipulator inside SEM. In 2016 IEEE International Conference on Robotics and Biomimetics, ROBIO 2016, Qingdao, China, December 3-7, 2016. pages 1293-1297, IEEE, 2016. [doi]

Authors

Chao Zhou

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Zhengxing Wu

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Lu Deng

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Yu Wang

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Zhiqiang Cao

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Min Tan

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