Scheduling a Single-ARM Multi-Cluster Tool with a Condition-Based Cleaning Operation

Qinghua Zhu 0001, Hongpeng Li, Cong Wang 0015, Yan Hou. Scheduling a Single-ARM Multi-Cluster Tool with a Condition-Based Cleaning Operation. IEEE CAA J. Autom. Sinica, 10(10):1965-1983, October 2023. [doi]

Authors

Qinghua Zhu 0001

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Hongpeng Li

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Cong Wang 0015

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Yan Hou

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