Influence Mechanism of the Surface Topography on the Positioning Measurement Accuracy of Micro-Vision Pattern Targets

Zijian Zhu, Chenyang Zhao, Yang Yang, Yueping Xi. Influence Mechanism of the Surface Topography on the Positioning Measurement Accuracy of Micro-Vision Pattern Targets. IEEE T. Instrumentation and Measurement, 74:1-12, 2025. [doi]

@article{ZhuZYX25,
  title = {Influence Mechanism of the Surface Topography on the Positioning Measurement Accuracy of Micro-Vision Pattern Targets},
  author = {Zijian Zhu and Chenyang Zhao and Yang Yang and Yueping Xi},
  year = {2025},
  doi = {10.1109/TIM.2025.3541711},
  url = {https://doi.org/10.1109/TIM.2025.3541711},
  researchr = {https://researchr.org/publication/ZhuZYX25},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {74},
  pages = {1-12},
}