Equilibrium and Stability of Micro-Cantilevers Used in Atomic Force Microscopy

Jean W. Zu, Gong Cheng, Qian Tang. Equilibrium and Stability of Micro-Cantilevers Used in Atomic Force Microscopy. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 537-540, IEEE Computer Society, 2004. [doi]

Authors

Jean W. Zu

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Gong Cheng

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Qian Tang

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