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Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System

Jurgen van Zundert, Tom Oomen, Jan Verhaegh, Wouter H. T. M. Aangenent, Duarte J. Antunes, W. P. M. H. Heemels. Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System. IEEE Trans. Contr. Sys. Techn., 28(2):448-461, 2020. [doi]

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Jurgen van Zundert

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Tom Oomen

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Jan Verhaegh

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Wouter H. T. M. Aangenent

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Duarte J. Antunes

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W. P. M. H. Heemels

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