Specification and Automatic Generation of Simulation Models with Applications in Semiconductor Manufacturing

Ralph Mueller. Specification and Automatic Generation of Simulation Models with Applications in Semiconductor Manufacturing. PhD thesis, Georgia Institute of Technology, Atlanta, GA, USA, 2007. [doi]

@phdthesis{basesearch-1817,
  title = {Specification and Automatic Generation of Simulation Models with Applications in Semiconductor Manufacturing},
  author = {Ralph Mueller},
  year = {2007},
  url = {https://www.base-search.net/Record/ba180efecb42572797e6386473a1757955fc7a2dca0cea4b0913713533152aec},
  note = {base-search.net (ftgeorgiatech:oai:smartech.gatech.edu:1853/16147)},
  researchr = {https://researchr.org/publication/basesearch-1817},
  cites = {0},
  citedby = {0},
  school = {Georgia Institute of Technology, Atlanta, GA, USA},
}