Artificial Evolution for the Optimization of Lithographic Process Conditions - researchr publication bibtex

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Tim Fühner. Artificial Evolution for the Optimization of Lithographic Process Conditions. PhD thesis, University of Erlangen-Nuremberg, 2014. [doi]

@phdthesis{dnb-1850,
  title = {Artificial Evolution for the Optimization of Lithographic Process Conditions},
  author = {Tim Fühner},
  year = {2014},
  url = {http://d-nb.info/1075832853},
  researchr = {https://researchr.org/publication/dnb-1850},
  cites = {0},
  citedby = {0},
  school = {University of Erlangen-Nuremberg},
}

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