Enabling technologies for CMOS-compatible MEMS biosensors

Silvia Lenci. Enabling technologies for CMOS-compatible MEMS biosensors. PhD thesis, University of Pisa, Italy, 2010. [doi]

@phdthesis{it-2033,
  title = {Enabling technologies for CMOS-compatible MEMS biosensors},
  author = {Silvia Lenci},
  year = {2010},
  url = {https://opac.bncf.firenze.sbn.it/bncf-prod/resource?uri=TD20015473},
  researchr = {https://researchr.org/publication/it-2033},
  cites = {0},
  citedby = {0},
  school = {University of Pisa, Italy},
}