Silvia Lenci. Enabling technologies for CMOS-compatible MEMS biosensors. PhD thesis, University of Pisa, Italy, 2010. [doi]
@phdthesis{it-2033, title = {Enabling technologies for CMOS-compatible MEMS biosensors}, author = {Silvia Lenci}, year = {2010}, url = {https://opac.bncf.firenze.sbn.it/bncf-prod/resource?uri=TD20015473}, researchr = {https://researchr.org/publication/it-2033}, cites = {0}, citedby = {0}, school = {University of Pisa, Italy}, }