Jeffrey Todd Hastings. Nanometer-precision electron-beam lithography with applications in integrated optics. PhD thesis, Massachusetts Institute of Technology, Cambridge, MA, USA, 2003. [doi]
@phdthesis{ndltd-1018,
title = {Nanometer-precision electron-beam lithography with applications in integrated optics},
author = {Jeffrey Todd Hastings},
year = {2003},
url = {http://hdl.handle.net/1721.1/29949},
note = {ndltd.org (oai:dspace.mit.edu:1721.1/29949)},
researchr = {https://researchr.org/publication/ndltd-1018},
cites = {0},
citedby = {0},
school = {Massachusetts Institute of Technology, Cambridge, MA, USA},
}