Vikas Sharma. MEMS micropump for a Micro Gas Analyzer. PhD thesis, Massachusetts Institute of Technology, Cambridge, MA, USA, 2009. [doi]
@phdthesis{ndltd-2061, title = {MEMS micropump for a Micro Gas Analyzer}, author = {Vikas Sharma}, year = {2009}, url = {http://hdl.handle.net/1721.1/54643}, note = {ndltd.org (oai:dspace.mit.edu:1721.1/54643)}, researchr = {https://researchr.org/publication/ndltd-2061}, cites = {0}, citedby = {0}, school = {Massachusetts Institute of Technology, Cambridge, MA, USA}, }