MEMS micropump for a Micro Gas Analyzer

Vikas Sharma. MEMS micropump for a Micro Gas Analyzer. PhD thesis, Massachusetts Institute of Technology, Cambridge, MA, USA, 2009. [doi]

@phdthesis{ndltd-2061,
  title = {MEMS micropump for a Micro Gas Analyzer},
  author = {Vikas Sharma},
  year = {2009},
  url = {http://hdl.handle.net/1721.1/54643},
  note = {ndltd.org (oai:dspace.mit.edu:1721.1/54643)},
  researchr = {https://researchr.org/publication/ndltd-2061},
  cites = {0},
  citedby = {0},
  school = {Massachusetts Institute of Technology, Cambridge, MA, USA},
}