Dario Gil. Maskless nanolithography and imaging with diffractive optical arrays. PhD thesis, Massachusetts Institute of Technology, Cambridge, MA, USA, 2003. [doi]
@phdthesis{ndltd-857,
title = {Maskless nanolithography and imaging with diffractive optical arrays},
author = {Dario Gil},
year = {2003},
url = {http://hdl.handle.net/1721.1/18066},
note = {ndltd.org (oai:dspace.mit.edu:1721.1/18066)},
researchr = {https://researchr.org/publication/ndltd-857},
cites = {0},
citedby = {0},
school = {Massachusetts Institute of Technology, Cambridge, MA, USA},
}