Yue Chen, Xiuhan Li, Dongming Fang, Quan Yuan, Haixia Zhang. Spiral capacitor based on copper electroplating. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 432-435, IEEE, 2009. [doi]
Abstract is missing.