A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Antoine Ferreira, Sumeet S. Aphale. A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 41(3):350-364, 2011. [doi]

Abstract

Abstract is missing.