Ahmed Amine Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. An electrical test method for MEMS convective accelerometers: Development and evaluation. In Design, Automation and Test in Europe, DATE 2011, Grenoble, France, March 14-18, 2011. pages 806-811, IEEE, 2011. [doi]
Abstract is missing.