Feiyang Ou - researchr alias

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Viewing Publication 1 - 3 from 3

2023

Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operationMatthew Tom, Henrik Wang, Feiyang Ou, Sungil Yun, Gerassimos Orkoulas, Panagiotis D. Christofides. cce, 178:108400, October 2023. [doi]

2022

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactorMatthew Tom, Sungil Yun, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides. cce, 168:108044, 2022. [doi]

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration designSungil Yun, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides. cce, 161:107757, 2022. [doi]

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