L. N. Sun - researchr alias

researchr

You are not signed in
Sign in
Sign up

Viewing Publication 1 - 3 from 3

2011

CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructuresLiang Qian, P. Z. Hong, L. N. Sun, Z. C. Yang, G. Z. Yan. nems 2011: 397-400 [doi]

Post CMOS integration of high aspect ratio SOI MEMS devicesL. N. Sun, L. Qian, P. Z. Hong, G. Z. Yan, Z. C. Yang. nems 2011: 166-169 [doi]

2010

Fabrication of Sub-100-nm silicon nanowire devices on SOI wafer by CMOS compatible fabrication processL. N. Sun, T. M. H. Lee, Z. C. Yang, G. Z. Yan. nems 2010: 971-974 [doi]

Sign in or sign up to see more results.

runs on WebDSL