Development and Testing of a Large-Stroke Nanopositioning Stage With Linear Active Disturbance Rejection Controller

Hui Tang 0003, Jiedong Li, Yingjie Jia, Jian Gao 0002, Yangmin Li 0001. Development and Testing of a Large-Stroke Nanopositioning Stage With Linear Active Disturbance Rejection Controller. IEEE T. Automation Science and Engineering, 19(3):2461-2470, 2022. [doi]

Abstract

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