Ming Luo 0003, Zhao Xu, Hian Leng Chan, Marjan Alavi. Online predictive maintenance approach for semiconductor equipment. In IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society, Vienna, Austria, November 10-13, 2013. pages 3662-3667, IEEE, 2013. [doi]
@inproceedings{0003XCA13,
title = {Online predictive maintenance approach for semiconductor equipment},
author = {Ming Luo 0003 and Zhao Xu and Hian Leng Chan and Marjan Alavi},
year = {2013},
doi = {10.1109/IECON.2013.6699718},
url = {https://doi.org/10.1109/IECON.2013.6699718},
researchr = {https://researchr.org/publication/0003XCA13},
cites = {0},
citedby = {0},
pages = {3662-3667},
booktitle = {IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society, Vienna, Austria, November 10-13, 2013},
publisher = {IEEE},
}