Online predictive maintenance approach for semiconductor equipment

Ming Luo 0003, Zhao Xu, Hian Leng Chan, Marjan Alavi. Online predictive maintenance approach for semiconductor equipment. In IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society, Vienna, Austria, November 10-13, 2013. pages 3662-3667, IEEE, 2013. [doi]

Abstract

Abstract is missing.