Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity

Chengxiang Wang 0005, Yunbin Kuang, Yulie Wu, Zhanqiang Hou, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao. Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1888-1892, IEEE, 2021. [doi]

@inproceedings{0005KWHZWX21,
  title = {Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity},
  author = {Chengxiang Wang 0005 and Yunbin Kuang and Yulie Wu and Zhanqiang Hou and Yongmeng Zhang and Xuezhong Wu and Dingbang Xiao},
  year = {2021},
  doi = {10.1109/NEMS51815.2021.9451473},
  url = {https://doi.org/10.1109/NEMS51815.2021.9451473},
  researchr = {https://researchr.org/publication/0005KWHZWX21},
  cites = {0},
  citedby = {0},
  pages = {1888-1892},
  booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
  publisher = {IEEE},
  isbn = {978-1-6654-1941-3},
}