Chengxiang Wang 0005, Yulie Wu, Zhanqiang Hou, Yunbin Kuang, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao. A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]
Abstract is missing.