Design of a resonant accelerometer integrated with a diamond like carbon film temperature sensor - researchr publication authors

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Bo Li 0108, Yulong Zhao, Xin Ma, Cun Li, Qi Zhang, You-Zhao. Design of a resonant accelerometer integrated with a diamond like carbon film temperature sensor. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

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