Design of a resonant accelerometer integrated with a diamond like carbon film temperature sensor

Bo Li 0108, Yulong Zhao, Xin Ma, Cun Li, Qi Zhang, You-Zhao. Design of a resonant accelerometer integrated with a diamond like carbon film temperature sensor. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

Abstract

Abstract is missing.