Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency - researchr publication authors

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M. Aarts, J. Wei, P. M. Sarro. Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 253-256, IEEE, 2012. [doi]

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