Salah Abadli, Farida Mansour. Growth of Grains Effect on Boron Diffusion in Heavily Implanted Polycrystalline silicon Thin Films. In 2006 International Conference on MEMS, NANO and Smart Systems, ICMENS 2006, Cairo, Egypt, December 27-29, 2006. pages 15-18, IEEE, 2006. [doi]
Abstract is missing.