G. S. Abarca-Jimenez, Mario Alfredo Reyes-Barranca, Salvador Mendoza-Acevedo, J. E. Munguia-Cervantes, M. A. Aleman-Arce. Modal analysis of a structure used as a capacitive MEMS accelerometer sensor. In 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014, Campeche, Mexico, September 29 - October 3, 2014. pages 1-4, IEEE, 2014. [doi]
Abstract is missing.