Lakhdari Abdelghani, MekkakiaMaaza Nasr-Eddine, Maamar Azouza, Bouguenna Abdellah, Kichene Moadh. Modeling of silicon MEMS capacitive pressure sensor for biomédical applications. In 9th International Design and Test Symposium, IDT 2014, Algeries, Algeria, December 16-18, 2014. pages 263-266, IEEE, 2014. [doi]
Abstract is missing.