Sonia Abdellatif, Brahim Mezghani, Frédérick Mailly, Pascal Nouet. Optimal Detector Position and Structure for a New 3-axis CMOS Thermal Microaccelerometer. In 17th International Multi-Conference on Systems, Signals & Devices, SSD 2020, Monastir, Tunisia, July 20-23, 2020. pages 1144-1149, IEEE, 2020. [doi]
Abstract is missing.