Jim Aberson, Pierre Cusin, James Wylde, Ryan Hickey, Heiko Fetti. Novel Backend Singulation Techniques to Enable Commercialization of Optical MEMS. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 131, IEEE Computer Society, 2003. [doi]
Abstract is missing.