Zero-Power MEMS Resonant Mass Sensor Inspired by Piezoelectric Vibration Energy Harvesting

Aylar Abouzarkhanifard, Hamidreza Ehsani Chimeh, Seyedfakhreddin Nabavi, Mohammad Al Janaideh, Lihong Zhang. Zero-Power MEMS Resonant Mass Sensor Inspired by Piezoelectric Vibration Energy Harvesting. In IEEE Sensors Applications Symposium, SAS 2023, Ottawa, ON, Canada, July 18-20, 2023. pages 1-5, IEEE, 2023. [doi]

Abstract

Abstract is missing.