Charging induced damage by photoconduction through thick inter metal dielectrics

Jan Ackaert, Klara Bessemans, Eddy De Backer. Charging induced damage by photoconduction through thick inter metal dielectrics. Microelectronics Reliability, 43(9-11):1525-1529, 2003. [doi]

Authors

Jan Ackaert

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Klara Bessemans

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Eddy De Backer

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