Charging induced damage by photoconduction through thick inter metal dielectrics

Jan Ackaert, Klara Bessemans, Eddy De Backer. Charging induced damage by photoconduction through thick inter metal dielectrics. Microelectronics Reliability, 43(9-11):1525-1529, 2003. [doi]

@article{AckaertBB03,
  title = {Charging induced damage by photoconduction through thick inter metal dielectrics},
  author = {Jan Ackaert and Klara Bessemans and Eddy De Backer},
  year = {2003},
  doi = {10.1016/S0026-2714(03)00270-1},
  url = {http://dx.doi.org/10.1016/S0026-2714(03)00270-1},
  researchr = {https://researchr.org/publication/AckaertBB03},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {43},
  number = {9-11},
  pages = {1525-1529},
}