Autonomous Scheduling in Semiconductor Back-End Manufacturing

Jelle Adan, Alp Akcay, John Fowler, Marc Albers, Michael Geurtsen. Autonomous Scheduling in Semiconductor Back-End Manufacturing. In Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022. pages 3489-3500, IEEE, 2022. [doi]

@inproceedings{AdanAFAG22,
  title = {Autonomous Scheduling in Semiconductor Back-End Manufacturing},
  author = {Jelle Adan and Alp Akcay and John Fowler and Marc Albers and Michael Geurtsen},
  year = {2022},
  doi = {10.1109/WSC57314.2022.10015252},
  url = {https://doi.org/10.1109/WSC57314.2022.10015252},
  researchr = {https://researchr.org/publication/AdanAFAG22},
  cites = {0},
  citedby = {0},
  pages = {3489-3500},
  booktitle = {Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-7661-4},
}