Autonomous Scheduling in Semiconductor Back-End Manufacturing

Jelle Adan, Alp Akcay, John Fowler, Marc Albers, Michael Geurtsen. Autonomous Scheduling in Semiconductor Back-End Manufacturing. In Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022. pages 3489-3500, IEEE, 2022. [doi]

Abstract

Abstract is missing.