Run To Run control based on categorical output in semiconductor manufacturing

El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Run To Run control based on categorical output in semiconductor manufacturing. In 5th International Conference on Systems and Control, ICSC 2016, Marrakesh, Morocco, May 25-27, 2016. pages 180-185, IEEE, 2016. [doi]

Abstract

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