Machine-Learning-Based Identification of Defect Patterns in Semiconductor Wafer Maps: An Overview and Proposal

Fatima Adly, Paul D. Yoo, Sami Muhaidat, Yousof Al-Hammadi. Machine-Learning-Based Identification of Defect Patterns in Semiconductor Wafer Maps: An Overview and Proposal. In 2014 IEEE International Parallel & Distributed Processing Symposium Workshops, Phoenix, AZ, USA, May 19-23, 2014. pages 420-429, IEEE, 2014. [doi]

Abstract

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