Investigation of a new method for dopant characterization

J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, A. Portavoce, C. Girardeaux. Investigation of a new method for dopant characterization. Microelectronics Reliability, 47(9-11):1599-1603, 2007. [doi]

Abstract

Abstract is missing.