On thermally-induced mechanical stress in high resistivity polysilicon resistors

Sweta Agarwal, Shouri Chatterjee, Rakesh Kumar Palani. On thermally-induced mechanical stress in high resistivity polysilicon resistors. In IEEE International Symposium on Circuits and Systems, ISCAS 2023, Monterey, CA, USA, May 21-25, 2023. pages 1-5, IEEE, 2023. [doi]

Abstract

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