Continuous-Time Modeling and Analysis of Particle Beam Metrology

Akshay Agarwal, Minxu Peng, Vivek K. Goyal. Continuous-Time Modeling and Analysis of Particle Beam Metrology. IEEE J. Sel. Areas Inf. Theory, 4:61-74, 2023. [doi]

Authors

Akshay Agarwal

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Minxu Peng

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Vivek K. Goyal

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