Continuous-Time Modeling and Analysis of Particle Beam Metrology

Akshay Agarwal, Minxu Peng, Vivek K. Goyal. Continuous-Time Modeling and Analysis of Particle Beam Metrology. IEEE J. Sel. Areas Inf. Theory, 4:61-74, 2023. [doi]

@article{AgarwalPG23,
  title = {Continuous-Time Modeling and Analysis of Particle Beam Metrology},
  author = {Akshay Agarwal and Minxu Peng and Vivek K. Goyal},
  year = {2023},
  doi = {10.1109/JSAIT.2023.3283911},
  url = {https://doi.org/10.1109/JSAIT.2023.3283911},
  researchr = {https://researchr.org/publication/AgarwalPG23},
  cites = {0},
  citedby = {0},
  journal = {IEEE J. Sel. Areas Inf. Theory},
  volume = {4},
  pages = {61-74},
}