H. Ahmad, A. J. Al-Khalili, L. Landsberger, M. Kahrizi. A 2D micromachined accelerometer. In Proceedings of Third International Conference on Electronics, Circuits, and Systems, ICECS 1996, Rodos, Greece, October 13-16, 1996. pages 908-911, IEEE, 1996. [doi]
Abstract is missing.